Books about Micromachining from Amazon.com

This text provides an introduction, at the level of an advanced student in engineering or physics, to the field of nanomechanics and nanomechanical devices. It provides a unified discussion of solid mechanics, transducer applications, and sources of noise and nonlinearity in such devices. Demonstrated applications of these devices, as well as an introduction to fabrication techniques, are also discussed. The text concludes with an overview of future technologies, including the potential use of carbon nanotubes and other molecular assemblies..
Price: $72.00 [Notify me when price goes down.]

This book presents an unconventional and largely unknown technology, which is able to micromachine glass, polymers, and other materials at relatively low cost. This process is called Spark Assisted Chemical Engraving (SACE), or Electro Chemical Discharge Machining (ECDM). First presented in 1968 in Japan by Kurafuji and Suda, this technology was studied essentially in the academic world and mainly applied for microfluidic devices.





Micromachining Using Electrochemical Discharge Phenomenon explains the fundamentals of SACE, promotes the technology, and encourages researchers and engineers from industry to use it for their specific applications. Therefore, the book, after presenting in details the fundaments of SACE (in particular the Electrochemical Discharges), deals mainly with practical aspects of implementing the machining technology. The book is written so that researchers from fields other than microtechnology (e.g., from life science) will be able to build a simple machining set-up, together with their mechanical workshop, for individual needs..
Price: $166.40 [Notify me when price goes down.]

Femtosecond technology, with its ultrashort light pulses, forms an innovative laser technology which can be used for multiple technical applications The book gives a comprehensive overview of the principles and applications of femtosecond lasers, especially applied to medicine and to production technology. The principles and features of such femtosecond technology are described. The lasers, systems and technologies that are required in these potential fields of application are investigated. The advantages and problems of ultrashort laser pulses are discussed in more detail in the context of applications in the micro-machining of technical materials such as drilling, surface structuring and cutting, in medical use like dental, ophthalmologic, neurological and otolaryngological applications, in metrology, and in the generation of x-rays. Safety aspects are also considered.

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Price: $150.98 [Notify me when price goes down.]

Volume 2 of the Handbook focuses on the process technology and the numerous device applications using Micromachining and microfabrication Ths handbook will be useful to researchers and engineers who are not yet specilists in the field and will serve as a reference book for experts. The material is presented in such a manner as to allow the book to be utilised as a comprehensive reference book..
Price: $117.99 [Notify me when price goes down.]

Due to the rapid progress in laser technology a wealth of novel fundamental and applied applications of lasers in atomic and plasma physics have become possible This book focuses on the interaction of high intensity lasers with matter. It reviews the state of the art of high power laser sources, intensity laser-atom and laser-plasma interactions, laser matter interaction at relativistic intensities, and QED with intense lasers.

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Price: $134.84 [Notify me when price goes down.]

Micromachined scanning mirrors are interesting for a wide variety of applications because of their potential low cost, high speed, low power consumption, and reliability These mirrors can offer significant advantages over macro-scale mirrors, but the fundamental limitations of scanning mirrors have not been widely discussed.
Miniaturization in electronic systems has led to radical improvements in computers and communications, and micromachining technologies promise to generate such improvements in miniaturized mechanical and optical systems, including specifically higher-speed, smaller, lower-cost scanning mirrors. Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components.
There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
Micromachined Mirrors presents descriptions of mirrors made from two fabrication processes - the surface-micromachining process and the staggered torsional electrostatic combdrive (STEC) high-aspect ratio micromachining process. The mirrors made using these two processes are evaluated for scan speed, optical resolution, ease of manufacture, and reliability.
Micromachined Mirrors also presents an example application of surface-micromachined mirrors: a raster-scanning projection video display. This demonstration shows the advantages of micromachined mirrors (small high-speed scanners) with special attention paid to the major drawback of surface-micromachined mirrors (lower resolution due to dynamic deformation). The successful demonstration of this simple prototype video display helps clarify the importance of the critical performance characteristics to consider when designing micromachined mirrors..
Price: $11.52 [Notify me when price goes down.]

Direct-Write Technologies covers applications, materials, and the techniques in using direct-write technologies. This book provides an overview of the different direct write techniques currently available, as well as a comparison between the strengths and special attributes for each of the techniques. The techniques described open the door for building prototypes and testing materials. The book also provides an overview of the state-of-the-art technology involved in this field. Basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications. Others in this or related fields will want the book to read the introductory material summarizing isuses common to all approaches, in order to compare and contrast different techniques. Everyday applications include electronic components and sensors, especially chemical and biosensors.

There is a wide range of research and development problems requiring state-of-the-art direct write tools. This book will appeal to basic researchers and development engineers in university engineering departments and at industrial and national research laboratories. This text should appeal equally well in the United States, Asia, and Europe.

Both basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications.

This book provides

An overview of the different direct write techniques currently available
A comparison between the strengths and special attributes for each of the techniques
An overview of the state-of-the-art technology involved in this field..
Price: $134.75 [Notify me when price goes down.]

Bonding in Microsystem Technology concerns the exciting field of microsystems (known under varying names as: MEMS, µTAS (analytical or chemical Microsystems), MOEMS: the micro-miniature devices, utilizing extremely miniaturized mechanical structures made usually from silicon by wet deep anisotropic etching. Such structures cannot be used directly, they must be designed and fabricated as a part of the three – dimensional multi-layer sandwich built from silicon or silicon and glass. The procedures of formation of such a sandwich are known as bonding. The book contains the description of wet anisotropic micromachining of basic silicon micromechanical constructions and their utilization in microsystems followed by the detailed discussion of all of methods of bonding used for the formation of silicon and silicon-glass microsystems, with the special attention paid to the anodic bonding technique.

Bonding in Microsystem Technology starts with descriptions of terminology, kinds of microsystems and market analysis. Following this, presentation of mechanisms of wet etching, set of process parameters, description of micromachining methods, examples of procedures, process flow-charts and applications of basic micromechanical structures in microsystems are shown. Next, high-temperature, low temperature and room-temperature bonding and their applications in microsystem technology are presented. The following part of the book contains the detailed description of anodic bonding, starting from analysis of properties of glasses suitable for anodic bonding, and discussion of the nature of the process. Next all types of anodic bonding and sealing procedures used in microsystem technology are presented. This part of the book finishes with examples of applications of anodic bonding in microsystem technology taken from the literature but mainly based on the author’s personal experience.

Bonding in Microsystem Technology is addressed to scientists and researchers, as well as to academic teachers and students, engineers active in the field of electric/electronics and microelectronics. It can serve as the encyclopaedia of wet etching and bonding for microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students. The book contains a large number of illustrations, algorithmic flow-charts and microsystems description and a rich index of literature sources.

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Price: $144.85 [Notify me when price goes down.]

The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook..
Price: $116.62 [Notify me when price goes down.]

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining..
Price: $20.00 [Notify me when price goes down.]